Uhv | Mbe | Mht | Ma | Mhz | Manipulators | Createc Vietnam | Pitesco Vn

PITESCO Việt Nam - Công ty XNK hàng đầu và là nhà cung cấp chuyên nghiệp các mặt hàng tự động, thiết bị điện và điện công nghiệp. Chúng tôi đáp ứng xu hướng công nghiệp hóa, hiện đại hóa

Vui lòng liên hệ với chúng tôi để được tư vấn và hỗ trợ giá tốt nhất.

Nguyễn Ngọc Nam 

 [Senior Sales Eng.]
  ============= 

Cellphone: 01666 455 335 |  0914 237 179

CreaTec manufactures a large variety of UHV and MBE substrate manipulators according to customer specifications. The manipulators are designed for different types of sample holders and various substrate sizes. Temperatures up to 1300 ?C are standard. Special manipulators reaching higher temperatures (up to 1700 ?C) are available as well as cooling stages for liquid nitrogen and liquid helium.

Different linear and rotational degrees of freedom allow the precise adjustment of the sample in the MBE system. Continuous sample rotation is standard. Manual or motorized linear and rotational drives are available. The manipulator fits the wafer transfer system of the customers facility. An optionally available shutter is used to protect the substrate before and after epitaxial growth.

Technical Data:

Type	MHT, MA or MHZ
Sample holder	Riber, VG, Veeco or as specified
Heating System	Radiation heating, tantalum or tungsten wire, self supported
Temperature range	1100?C (Ta), 1300?C (W)
Bakeout temperature	200?C
Conditioning	Heated to max. tempature in UHV
Shipping	Stainless steel container with valve

Standards:

Flange size	CF100 / CF 160 / CF 200
Sample size	2 / 3 / 4  inch (or as specified)
Motion	X, Y: ?12.5mm, Z: ?25mm
Rotation	Azimuth: continuous                                   Manipulator axis: ?170? (max.)

Options:

• LN2 or LHe cooling
• Mask holder
• E-beam or laser heating
• Biasing
• Integrated shutter
• Lamp heater